LP-BS

小型實驗用真空蒸著機

特色:

  1. 配備有觸控螢幕,操作螢幕採圖形化設計,簡明易操作。
  2. 提供多組蒸鍍參數,蒸鍍時客戶可依不同產品製程分別設定。
  3. 提供手動/自動轉速及蒸鍍電壓控制,方便製程的控制。
  4. 可選配石英膜厚控制器,進行精確膜厚監控。

產業:

  1. 3C產品製造業
  2. 汽車燈具製造業
  3. 化妝品包裝製造業
  4. 油漆產業開發

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腔體高度

500 ~ 700 mm

800 ~ 900 mm

800 ~ 1000 mm

視窗

1組

迴轉幫浦

600公升/  每分鐘

1500公升/  每分鐘

3000公升/  每分鐘

加強幫浦

-

300 M3/ 每小時

600 M3/ 每小時

擴散幫浦

10英吋

18英吋

22英吋

高真空閥

10英吋

16~18英吋

16~22英吋

粗抽閥

1英吋

2英吋

3英吋

預抽閥

1英吋

2英吋

3英吋

洩氣閥

1英吋

1英吋

1英吋

到達真空度

10-6  Torr (10-4Pa)

排氣速度

從一大氣壓到 3x10-4 Torr(4X10-2Pa)  10分鐘之內 (空爐時)

操作方式

自動/手動

蒸著電源

6~10 KW

真空計

冷陰極真空計(1ATM ~ 10-7 Torr / 1ATM ~ 10-5Pa )

控制箱

1組

冷卻系統

 水壓: 4Kg/ cm2; 壓差:2Kg/ cm2

冷卻水流量

20 公升/  每分鐘

50公升/  每分鐘

80公升/  每分鐘

冷卻水溫度

入水18℃,出水25℃,標準溫度20℃

空壓機

1HP~3HP (空壓:  5 ~ 8 Kg/ cm2)

所需電力

20KW

25KW

30KW

備註:

  1. 高真空幫浦除標準配備擴散幫浦外,尚可依客戶需求選擇搭配Cryo Pump 或 Turbo Pump…等。
  2. 其他選配件: 膜厚計、電子槍、冷凍機…等。

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